Inventor · disambiguated record
Shao-Yen Ku
Also filed as: KU SHAO-YEN
36 granted patents·2 pending applications·77 citations·filing 2002–2023
95Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD25TAIWAN SEMICONDUCTOR MFG6KU SHAO-YEN3CHOU CHUN-LI2CHIEN YING-HSUEH CHANG1
Top patents by PatentIndex Score
38 records- 0192US8105851B1Nitride film wet strippingKU SHAO-YEN·Filed 2010·Granted Jan 31, 2012·19 cites·19 claims
- 0287US8616821B2Integrated apparatus to assure wafer quality and manufacturabilityKU SHAO-YEN·Filed 2010·Granted Dec 31, 2013·12 cites·5 claims
- 0383US8926762B2Apparatus and methods for movable megasonic wafer probeCHIEN YING-HSUEH CHANG·Filed 2011·Granted Jan 6, 2015·5 cites·20 claims
- 0481US8518634B2Cleaning process for semiconductor device fabricationYEH MING-HSI·Filed 2011·Granted Aug 27, 2013·5 cites·18 claims
- 0579US9494261B2Chemical dispense system with reduced contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Nov 15, 2016·5 cites·20 claims
- 0679US7776757B2Method of fabricating high-k metal gate devicesTAIWAN SEMICONDUCTOR MFG·Filed 2009·Granted Aug 17, 2010·8 cites·21 claims
- 0777US9478444B2Mechanisms for cleaning wafer and scrubberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Oct 25, 2016·6 cites·20 claims
- 0874US9583352B2Method of etching and cleaning wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Feb 28, 2017·2 cites·20 claims
- 0967US9728533B2Aqueous cleaning techniques and compositions for use in semiconductor device manufactureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Aug 8, 2017·1 cites·20 claims
- 1067US9117760B2Method and system for energized and pressurized liquids for cleaning/etching applications in semiconductor manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Aug 25, 2015·2 cites·16 claims
- 1167US8916429B2Aqueous cleaning techniques and compositions for use in semiconductor device manufacturingCHOU CHUN-LI·Filed 2012·Granted Dec 23, 2014·2 cites·14 claims
- 1266US9764364B2Apparatus and methods for movable megasonic wafer probeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Sep 19, 2017·0 cites·20 claims
- 1362US9997384B2Methods for transporting wafers between wafer holders and chambersKU SHAO YEN·Filed 2011·Granted Jun 12, 2018·2 cites·20 claims
- 1460US6455405B1Using implantation method to control gate oxide thickness on dual oxide semiconductor devicesTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Sep 24, 2002·7 cites·30 claims
- 1559US11090696B2Apparatus and method of removing photoresist layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 17, 2021·0 cites·20 claims
- 1657US2010126531A1Method and apparatus for cleaning semiconductor device fabrication equipment using supercritical fluidsTAIWAN SEMICONDUCTOR MFG·Filed 2008·Application pending·0 cites
- 1756US10510527B2Single wafer cleaning tool with H2SO4 recyclingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 17, 2019·1 cites·20 claims
- 1856US2025033091A1Brush cleaning system and brush cleaning methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 1955US12090527B2Method and system for processing substrate in semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 17, 2024·0 cites·20 claims
- 2054US10486204B2Semiconductor apparatus and method of removing photoresist layer on substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Nov 26, 2019·0 cites·21 claims
- 2148US10161545B2Chemical dispense system with reduced contaminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Dec 25, 2018·0 cites·20 claims
- 2248US9805946B2Photoresist removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Oct 31, 2017·0 cites·20 claims
- 2347US11664235B2Photoresist removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted May 30, 2023·0 cites·20 claims
- 2447US9136149B2Loading port, system for etching and cleaning wafers and method of useTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Sep 15, 2015·0 cites·20 claims
- 2547US9064807B2Integrated platform for improved wafer manufacturing qualityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 23, 2015·0 cites·18 claims
- 2646US7585737B2Method of manufacturing double diffused drains in semiconductor devicesTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Sep 8, 2009·0 cites·20 claims
- 2744US10780461B2Methods for processing substrate in semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 22, 2020·0 cites·20 claims
- 2844US9048089B2Apparatus to improve internal wafer temperature profileTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 2, 2015·0 cites·20 claims
- 2943US10497557B2Integrated platform for improved wafer manufacturing qualityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Dec 3, 2019·0 cites·20 claims
- 3038US9704714B2Method for controlling surface charge on wafer surface in semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jul 11, 2017·0 cites·21 claims
- 3138US9349617B2Mechanisms for wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted May 24, 2016·0 cites·13 claims
- 3237US9781994B2Wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2012·Granted Oct 10, 2017·0 cites·20 claims
- 3337US6703320B1Successful and easy method to remove polysilicon filmTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 9, 2004·0 cites·43 claims
- 3436US10276469B2Method for forming semiconductor device structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 30, 2019·0 cites·20 claims
- 3536US9887095B2System and method for an etch process with silicon concentration controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Feb 6, 2018·0 cites·17 claims
- 3635US9881816B2Cleaning composition and method for semiconductor device fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jan 30, 2018·0 cites·11 claims
- 3733US9601360B2Wafer transport methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 21, 2017·0 cites·20 claims
- 3833US9263337B2Semiconductor device and method of manufactureCHOU CHUN-LI·Filed 2012·Granted Feb 16, 2016·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →