Inventor · disambiguated record

Takashi Tanakajima

Also filed as: TANAKAJIMA TAKASHI

2 granted patents·119 citations·filing 1992–1994

69Inventor score

Technology areasH10P

Files withSHINETSU HANDOTAI KK2

Top patents by PatentIndex Score

2 records

0183US5317778AAutomatic cleaning apparatus for wafersSHINETSU HANDOTAI KK·Filed 1992·Granted Jun 7, 1994·79 cites·21 claims
0268US5547515AMethod for handling or processing semiconductor wafersSHINETSU HANDOTAI KK·Filed 1994·Granted Aug 20, 1996·40 cites·3 claims

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