Inventor · disambiguated record
Kiyoshi Ooiwa
Also filed as: OOIWA KIYOSHI
3 granted patents·245 citations·filing 1988–1992
79Inventor score
Top patents by PatentIndex Score
3 records- 0193US4891118APlasma processing apparatusFUJI ELECTRIC CO LTD·Filed 1988·Granted Jan 2, 1990·105 cites·3 claims
- 0289US5310452APlasma process apparatus and plasma processing methodFUJITSU LTD·Filed 1992·Granted May 10, 1994·62 cites·5 claims
- 0387US5160397APlasma process apparatus and plasma processing methodFUJITSU LTD·Filed 1990·Granted Nov 3, 1992·78 cites·12 claims
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