Inventor · disambiguated record
Masaru Tomono
Also filed as: TOMONO MASARU
8 granted patents·3 pending applications·3 citations·filing 2014–2024
73Inventor score
Files withTOKYO ELECTRON LTD11
Top patents by PatentIndex Score
11 records- 0169US10025190B2Substrate treatment systemTOKYO ELECTRON LTD·Filed 2014·Granted Jul 17, 2018·2 cites·12 claims
- 0265US10274843B2Exposure apparatus, exposure method and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Apr 30, 2019·1 cites·7 claims
- 0360US2025021027A1Edge exposure apparatus and edge exposure methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0452US2016320713A1Substrate treatment system, substrate transfer method, and computer storage mediumTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0549US2018164700A1Substrate treatment system, substrate transfer method, and computer storage mediumTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 0646US11256172B2Light irradiating device, light irradiating method and recording mediumTOKYO ELECTRON LTD·Filed 2020·Granted Feb 22, 2022·0 cites·7 claims
- 0741US10101669B2Exposure apparatus, resist pattern forming method, and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Oct 16, 2018·0 cites·22 claims
- 0838US10527948B2Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Jan 7, 2020·0 cites·18 claims
- 0937US9899243B2Light irradiation apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Feb 20, 2018·0 cites·8 claims
- 1036US10558125B2Exposure apparatus, exposure apparatus adjustment method and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Feb 11, 2020·0 cites·20 claims
- 1135US10747121B2Optical processing apparatus and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Aug 18, 2020·0 cites·10 claims
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