Inventor · disambiguated record
Luis P. Bernal
Also filed as: BERNAL LUIS P
3 granted patents·92 citations·filing 2002–2017
71Inventor score
Top patents by PatentIndex Score
3 records- 0188US7008193B2Micropump assembly for a microgas chromatograph and the likeUNIV MICHIGAN·Filed 2003·Granted Mar 7, 2006·48 cites·23 claims
- 0285US6942750B2Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabricationUNIV MICHIGAN·Filed 2002·Granted Sep 13, 2005·44 cites·18 claims
- 0340US10563642B2Modular stacked variable-compression micropump and method of making sameUNIV MICHIGAN REGENTS·Filed 2017·Granted Feb 18, 2020·0 cites·19 claims
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