Inventor · disambiguated record
Atsuo Sanda
Also filed as: SANDA ATSUO
5 granted patents·1 pending application·169 citations·filing 1993–2005
84Inventor score
Files withTOSHIBA KK5
Top patents by PatentIndex Score
6 records- 0184US7201851B2Vacuum processing apparatus and substrate transfer methodTOSHIBA KK·Filed 2005·Granted Apr 10, 2007·11 cites·5 claims
- 0280US5795399ASemiconductor device manufacturing apparatus, method for removing reaction product, and method of suppressing deposition of reaction productTOSHIBA KK·Filed 1995·Granted Aug 18, 1998·77 cites·18 claims
- 0379US5415728AMethod of performing plain etching treatment and apparatus thereforTOSHIBA KK·Filed 1993·Granted May 16, 1995·58 cites·4 claims
- 0462US6990747B2Vacuum processing apparatus and substrate transfer methodTOSHIBA KK·Filed 2004·Granted Jan 31, 2006·8 cites·8 claims
- 0551US5837093AApparatus for performing plain etching treatmentTOSHIBA KK·Filed 1995·Granted Nov 17, 1998·15 cites·11 claims
- 0632US2004188739A1Semiconductor device including trench capacitor and manufacturing method of the sameFiled 2004·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →