Inventor · disambiguated record
John C. Valcore, Jr.
Also filed as: VALCORE JOHN · VALCORE JOHN C · VALCORE JR JOHN · VALCORE JR JOHN C
94 granted patents·9 pending applications·1,310 citations·filing 2007–2025
99Inventor score
Top patents by PatentIndex Score
103 records- 0199US9508529B2System, method and apparatus for RF power compensation in a plasma processing systemLAM RES CORP·Filed 2014·Granted Nov 29, 2016·123 cites·18 claims
- 0298US9842725B2Using modeling to determine ion energy associated with a plasma systemLAM RES CORP·Filed 2014·Granted Dec 12, 2017·48 cites·23 claims
- 0398US8501631B2Plasma processing system control based on RF voltageVALCORE JR JOHN C·Filed 2010·Granted Aug 6, 2013·31 cites·20 claims
- 0497US12322572B2Systems and methods for tuning a MHz RF generator within a cycle of operation of a kHz RF generatorLAM RES CORP·Filed 2024·Granted Jun 3, 2025·2 cites·32 claims
- 0597US10469108B2Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generatorLAM RES CORP·Filed 2016·Granted Nov 5, 2019·35 cites·18 claims
- 0697US10231321B2State-based adjustment of power and frequencyLAM RES CORP·Filed 2015·Granted Mar 12, 2019·17 cites·16 claims
- 0797US10102321B2System, method and apparatus for refining radio frequency transmission system modelsLAM RES CORP·Filed 2014·Granted Oct 16, 2018·52 cites·20 claims
- 0897US9779196B2Segmenting a model within a plasma systemLAM RES CORP·Filed 2014·Granted Oct 3, 2017·35 cites·25 claims
- 0997US9620337B2Determining a malfunctioning device in a plasma systemLAM RES CORP·Filed 2014·Granted Apr 11, 2017·29 cites·22 claims
- 1097US9607810B2Impedance-based adjustment of power and frequencyLAM RES CORP·Filed 2015·Granted Mar 28, 2017·19 cites·11 claims
- 1197US9390893B2Sub-pulsing during a stateLAM RES CORP·Filed 2014·Granted Jul 12, 2016·35 cites·19 claims
- 1297US9320126B2Determining a value of a variable on an RF transmission modelVALCORE JR JOHN C·Filed 2012·Granted Apr 19, 2016·47 cites·20 claims
- 1397US9171699B2Impedance-based adjustment of power and frequencyVALCORE JR JOHN C·Filed 2012·Granted Oct 27, 2015·24 cites·11 claims
- 1497US9114666B2Methods and apparatus for controlling plasma in a plasma processing systemVALCORE JR JOHN C·Filed 2012·Granted Aug 25, 2015·37 cites·29 claims
- 1597US8901935B2Methods and apparatus for detecting the confinement state of plasma in a plasma processing systemVALCORE JR JOHN C·Filed 2010·Granted Dec 2, 2014·31 cites·17 claims
- 1696US11361942B2Adjustment of power and frequency based on three or more statesLAM RES CORP·Filed 2020·Granted Jun 14, 2022·4 cites·13 claims
- 1796US10157729B2Soft pulsingLAM RES CORP·Filed 2014·Granted Dec 18, 2018·25 cites·20 claims
- 1896US9720022B2Systems and methods for providing characteristics of an impedance matching model for use with matching networksLAM RES CORP·Filed 2015·Granted Aug 1, 2017·21 cites·25 claims
- 1996US9455126B2Arrangement for plasma processing system control based on RF voltageLAM RES CORP·Filed 2015·Granted Sep 27, 2016·12 cites·12 claims
- 2096US9408288B2Edge rampingVALCORE JR JOHN C·Filed 2012·Granted Aug 2, 2016·27 cites·23 claims
- 2196US9368329B2Methods and apparatus for synchronizing RF pulses in a plasma processing systemVALCORE JR JOHN C·Filed 2012·Granted Jun 14, 2016·24 cites·27 claims
- 2296US9299539B2Method and apparatus for measuring wafer bias potentialMAKHRATCHEV KONSTANTIN·Filed 2009·Granted Mar 29, 2016·44 cites·7 claims
- 2396US7728602B2Harmonic derived arc detectorMKS INSTR INC·Filed 2007·Granted Jun 1, 2010·102 cites·33 claims
- 2495US11929235B2Systems and methods for tuning a MHz RF generator within a cycle of operation of a kHZ RF generatorLAM RES CORP·Filed 2020·Granted Mar 12, 2024·3 cites·32 claims
- 2595US10853444B2Systems and methods for tuning an impedance matching network in a step-wise fashionLAM RES CORP·Filed 2020·Granted Dec 1, 2020·5 cites·20 claims
- 2695US9997333B2Sub-pulsing during a stateLAM RES CORP·Filed 2017·Granted Jun 12, 2018·11 cites·20 claims
- 2795US9960015B2Impedance-based adjustment of power and frequencyLAM RES CORP·Filed 2017·Granted May 1, 2018·9 cites·13 claims
- 2895US9831065B2Computation of statistics for statistical data decimationLAM RES CORP·Filed 2016·Granted Nov 28, 2017·15 cites·21 claims
- 2995US9812294B2Sub-pulsing during a stateLAM RES CORP·Filed 2016·Granted Nov 7, 2017·11 cites·20 claims
- 3095US9711332B2Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generatorLAM RES CORP·Filed 2016·Granted Jul 18, 2017·17 cites·21 claims
- 3195US9620334B2Control of etch rate using modeling, feedback and impedance matchLAM RES CORP·Filed 2014·Granted Apr 11, 2017·20 cites·23 claims
- 3294US10325759B2Multiple control modesLAM RES CORP·Filed 2016·Granted Jun 18, 2019·11 cites·15 claims
- 3394US9837252B2Systems and methods for using one or more fixtures and efficiency to determine parameters of a match network modelLAM RES CORP·Filed 2016·Granted Dec 5, 2017·10 cites·18 claims
- 3494US9831071B2Systems and methods for using multiple inductive and capacitive fixtures for applying a variety of plasma conditions to determine a match network modelLAM RES CORP·Filed 2016·Granted Nov 28, 2017·12 cites·18 claims
- 3594US9197196B2State-based adjustment of power and frequencyVALCORE JR JOHN C·Filed 2012·Granted Nov 24, 2015·17 cites·4 claims
- 3693US10319570B2Determining a malfunctioning device in a plasma systemLAM RES CORP·Filed 2017·Granted Jun 11, 2019·5 cites·20 claims
- 3793US10020168B1Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generatorLAM RES CORP·Filed 2017·Granted Jul 10, 2018·6 cites·25 claims
- 3893US9673026B2Edge rampingLAM RES CORP·Filed 2016·Granted Jun 6, 2017·9 cites·20 claims
- 3993US9236228B2Frequency enhanced impedance dependent power control for multi-frequency RF pulsingLAM RES CORP·Filed 2015·Granted Jan 12, 2016·7 cites·15 claims
- 4093US9030101B2Frequency enhanced impedance dependent power control for multi-frequency RF pulsingLAM RES CORP·Filed 2012·Granted May 12, 2015·13 cites·20 claims
- 4193US8890537B2Harmonic derived arc detectorVALCORE JR JOHN·Filed 2010·Granted Nov 18, 2014·66 cites·45 claims
- 4292US10074520B2Adjustment of power and frequency based on three or more statesLAM RES CORP·Filed 2017·Granted Sep 11, 2018·7 cites·20 claims
- 4392US9627186B2System, method and apparatus for using optical data to monitor RF generator operationsLAM RES CORP·Filed 2014·Granted Apr 18, 2017·14 cites·15 claims
- 4492US9502216B2Using modeling to determine wafer bias associated with a plasma systemVALCORE JR JOHN C·Filed 2013·Granted Nov 22, 2016·11 cites·35 claims
- 4592US9295148B2Computation of statistics for statistical data decimationLAM RES CORP·Filed 2013·Granted Mar 22, 2016·17 cites·26 claims
- 4691US10950421B2Using modeling for identifying a location of a fault in an RF transmission system for a plasma systemLAM RES CORP·Filed 2014·Granted Mar 16, 2021·11 cites·21 claims
- 4791US10296676B2Systems and methods for tuning an impedance matching network in a step-wise fashionLAM RES CORP·Filed 2016·Granted May 21, 2019·10 cites·21 claims
- 4891US9530620B2Dual control modesLAM RES CORP·Filed 2014·Granted Dec 27, 2016·10 cites·20 claims
- 4991US9462672B2Adjustment of power and frequency based on three or more statesLAM RES CORP·Filed 2013·Granted Oct 4, 2016·13 cites·15 claims
- 5090US10762266B2Segmenting a model within a plasma systemLAM RES CORP·Filed 2019·Granted Sep 1, 2020·4 cites·20 claims
Showing the top 50 of 103 patent records by PatentIndex Score.
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