Inventor · disambiguated record
Ed Santos
Also filed as: SANTOS ED
2 granted patents·5 citations·filing 2009–2009
48Inventor score
Files withVALCORE JR JOHN C2
Top patents by PatentIndex Score
2 records- 0168US8797705B2Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potentialVALCORE JR JOHN C·Filed 2009·Granted Aug 5, 2014·3 cites·20 claims
- 0265US8440061B2System and method for plasma arc detection, isolation and preventionVALCORE JR JOHN C·Filed 2009·Granted May 14, 2013·2 cites·7 claims
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