Inventor · disambiguated record
Wolfgang Rieth
Also filed as: RIETH WOLFGANG
1 granted patent·1 pending application·1 citations·filing 2011–2021
15Inventor score
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2 records- 0146US9644259B2Apparatus for coating substrates using the EB/PVD methodHOTZ JUERGEN·Filed 2011·Granted May 9, 2017·1 cites·10 claims
- 0236US2023302487A1Method for changing a workpiece carrier device, workpiece carrier device and production plant for coating substratesALD VACUUM TECHN GMBH·Filed 2021·Application pending·0 cites
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