Inventor · disambiguated record
Hironobu Ichikawa
Also filed as: ICHIKAWA HIRONOBU
9 granted patents·2 pending applications·20 citations·filing 2004–2016
82Inventor score
Top patents by PatentIndex Score
11 records- 0185US8105949B2Substrate processing methodHONDA MASANOBU·Filed 2009·Granted Jan 31, 2012·10 cites·9 claims
- 0276US9613824B2Etching methodTOKYO ELECTRON LTD·Filed 2016·Granted Apr 4, 2017·3 cites·15 claims
- 0374US9793134B2Etching methodTOKYO ELECTRON LTD·Filed 2016·Granted Oct 17, 2017·2 cites·8 claims
- 0471US9087676B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jul 21, 2015·2 cites·7 claims
- 0565US7682544B2Method of fabricating photovoltaic panelFUJI MACHINE MFG·Filed 2005·Granted Mar 23, 2010·2 cites·4 claims
- 0664US8557706B2Substrate processing methodHONDA MASANOBU·Filed 2011·Granted Oct 15, 2013·1 cites·9 claims
- 0750US9318340B2Method of manufacturing a semiconductor deviceTOKYO ELECTRON LTD·Filed 2012·Granted Apr 19, 2016·0 cites·5 claims
- 0849US2010081287A1Dry etching methodTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0948US9881806B2Method of manufacturing a semiconductor deviceTOKYO ELECTRON LTD·Filed 2016·Granted Jan 30, 2018·0 cites·8 claims
- 1044US9147580B2Plasma etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Sep 29, 2015·0 cites·7 claims
- 1137US2005121813A1Method of forming photovoltaic device lens and method of fabricating photovoltaic panelFUJI MACHINE MFG·Filed 2004·Application pending·0 cites
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