Inventor · disambiguated record
Edward J. Mcinerney
Also filed as: MCINERNEY EDWARD · MCINERNEY EDWARD J · MCINERNEY EDWARD JOHN
18 granted patents·2 pending applications·1,401 citations·filing 1974–2017
96Inventor score
Top patents by PatentIndex Score
20 records- 0197US6143082AIsolation of incompatible processes in a multi-station processing chamberNOVELLUS SYSTEMS INC·Filed 1998·Granted Nov 7, 2000·672 cites·17 claims
- 0293US6319553B1Isolation of incompatible processes in a multi-station processing chamberNOVELLUS SYSTEMS INC·Filed 2000·Granted Nov 20, 2001·79 cites·13 claims
- 0391US4690746AInterlayer dielectric processGENUS INC·Filed 1986·Granted Sep 1, 1987·312 cites·6 claims
- 0489US5882417AApparatus for preventing deposition on frontside peripheral region and edge of wafer in chemical vapor deposition apparatusNOVELLUS SYSTEMS INC·Filed 1996·Granted Mar 16, 1999·90 cites·2 claims
- 0583US10302553B2Gas exhaust by-product measurement systemLAM RES CORP·Filed 2017·Granted May 28, 2019·4 cites·16 claims
- 0683US6397861B1Situ plasma clean gas injectionNOVELLUS SYSTEMS INC·Filed 2000·Granted Jun 4, 2002·21 cites·8 claims
- 0781US5843233AExclusion guard and gas-based substrate protection for chemical vapor deposition apparatusNOVELLUS SYSTEMS INC·Filed 1995·Granted Dec 1, 1998·51 cites·13 claims
- 0880US8906450B1Cold spray system nozzleMCINERNEY EDWARD J·Filed 2011·Granted Dec 9, 2014·4 cites·14 claims
- 0980US6918824B2Uniform fluid distribution and exhaust system for a chemical-mechanical planarization deviceNOVELLUS SYSTEMS INC·Filed 2003·Granted Jul 19, 2005·22 cites·24 claims
- 1077US9218945B2Magnetron with gradually increasing magnetic field out of turnaroundsCHETCUTI FRED·Filed 2011·Granted Dec 22, 2015·6 cites·10 claims
- 1177US6561796B1Method of semiconductor wafer heating to prevent bowingNOVELLUS SYSTEMS INC·Filed 2000·Granted May 13, 2003·23 cites·12 claims
- 1272US5653813ACyclone evaporatorNOVELLUS SYSTEMS INC·Filed 1995·Granted Aug 5, 1997·39 cites·25 claims
- 1370US7757323B2Belt drive washerGEN ELECTRIC·Filed 2006·Granted Jul 20, 2010·2 cites·14 claims
- 1467US5901271AProcess of evaporating a liquid in a cyclone evaporatorNOVELLUS SYSTEMS INC·Filed 1997·Granted May 4, 1999·30 cites·13 claims
- 1567US3993621AReinforced styrene acrylonitrile copolymer having improved temperature resistant propertiesGEN ELECTRIC·Filed 1974·Granted Nov 23, 1976·11 cites·7 claims
- 1662US6277235B1In situ plasma clean gas injectionNOVELLUS SYSTEMS INC·Filed 1998·Granted Aug 21, 2001·24 cites·15 claims
- 1753US2007095111A1Belt drive washerWATKINS DEREK L·Filed 2005·Application pending·0 cites
- 1847US5371113APolyurethane foam of low thermal conductivity and method of preparationGEN ELECTRIC·Filed 1993·Granted Dec 6, 1994·8 cites·11 claims
- 1945US2005132755A1Apparatus for reducing retained moisture content of articles and method of fabricatingGEN ELECTRIC·Filed 2003·Application pending·0 cites
- 2035US5397809APolyurethane foam of low thermal conductivity and method of preparationGEN ELECTRIC·Filed 1994·Granted Mar 14, 1995·3 cites·7 claims
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