Inventor · disambiguated record

Mana Elisabeth Reuhman-Huisken

Also filed as: REUHMAN-HUISKEN MANA ELISABETH

1 granted patent·4 citations·filing 2010–2010

31Inventor score

Technology areasG03F

Files withCADEE THEODORUS PETRUS MARIA1

Top patents by PatentIndex Score

1 record

0188US9268242B2Lithographic apparatus and device manufacturing method involving a heater and a temperature sensorCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Feb 23, 2016·4 cites·38 claims

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