Inventor · disambiguated record
Kazuma Tanii
Also filed as: TANII KAZUMA
4 granted patents·3 citations·filing 2007–2020
60Inventor score
Files withHITACHI HIGH TECH CORP4
Top patents by PatentIndex Score
4 records- 0173US12106930B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2019·Granted Oct 1, 2024·1 cites·15 claims
- 0263US9368319B2Method for removing foreign substances in charged particle beam device, and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2013·Granted Jun 14, 2016·1 cites·11 claims
- 0363US7514683B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Apr 7, 2009·1 cites·3 claims
- 0455US11276548B2Charged particle beam device and charged particle beam adjustment methodHITACHI HIGH TECH CORP·Filed 2020·Granted Mar 15, 2022·0 cites·13 claims
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