Inventor · disambiguated record
Yuuki Suka
Also filed as: SUKA YUUKI
5 granted patents·2 pending applications·10 citations·filing 2011–2013
70Inventor score
Top patents by PatentIndex Score
7 records- 0186US8420292B2Polymer, resist composition, and patterning processHARADA YUJI·Filed 2011·Granted Apr 16, 2013·6 cites·24 claims
- 0284US8697903B2Fluorinated ester monomer, making method, fluorinated ester polymer, and difluorohydroxycarboxylic acidKINSHO TAKESHI·Filed 2011·Granted Apr 15, 2014·3 cites·1 claims
- 0360US9086628B2Resist protective film-forming composition and patterning processSUKA YUUKI·Filed 2012·Granted Jul 21, 2015·1 cites·17 claims
- 0458US9261783B2Fluorinated ester monomer, making method, fluorinated ester polymer, and difluorohydroxycarboxylic acidSHINETSU CHEMICAL CO·Filed 2013·Granted Feb 16, 2016·0 cites·4 claims
- 0544US8795946B2Polymerizable ester compound, polymer, resist composition, and patterning processHASEGAWA KOJI·Filed 2012·Granted Aug 5, 2014·0 cites·9 claims
- 0642US2013130177A1Negative pattern forming process and negative resist compositionSHINETSU CHEMICAL CO·Filed 2012·Application pending·0 cites
- 0740US2013065183A1Patterning process and resist compositionKOBAYASHI TOMOHIRO·Filed 2012·Application pending·0 cites
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