Inventor · disambiguated record
Hajime Ugajin
Also filed as: UGAJIN HAJIME
5 granted patents·2 pending applications·25 citations·filing 2004–2024
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0179US8440568B2Substrate etching method and systemUGAJIN HAJIME·Filed 2010·Granted May 14, 2013·8 cites·8 claims
- 0274US7979942B2Substrate treatment apparatus and substrate treatment methodDAINIPPON SCREEN MFG·Filed 2007·Granted Jul 19, 2011·5 cites·21 claims
- 0366US7252778B2Etching method and etching deviceSONY CORP·Filed 2004·Granted Aug 7, 2007·10 cites·4 claims
- 0465US8968475B2Substrate processing apparatusODAGIRI MASAYA·Filed 2012·Granted Mar 3, 2015·2 cites·7 claims
- 0555US2025046579A1Copper-layer etching method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0640US2006244078A1Etching method and etching deviceIWAMOTO HAYATO·Filed 2006·Application pending·0 cites
- 0739US8956546B2Substrate processing method and substrate processing apparatusUGAJIN HAJIME·Filed 2011·Granted Feb 17, 2015·0 cites·18 claims
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