Inventor · disambiguated record
Chi-Hua Fu
Also filed as: FU CHI-HUA
4 granted patents·1 pending application·8 citations·filing 2012–2024
69Inventor score
Technology areasG03F
Top patents by PatentIndex Score
5 records- 0191US11275301B2Extreme ultraviolet mask and method of manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 15, 2022·3 cites·20 claims
- 0289US11774844B2Extreme ultraviolet mask and method of manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 3, 2023·1 cites·20 claims
- 0387US2025093764A1Extreme ultraviolet maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0484US12181791B2Extreme ultraviolet mask and method of manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 31, 2024·0 cites·20 claims
- 0576US9170496B2Method of pre-treating a wafer surface before applying a solvent-containing material thereonFU CHI-HUA·Filed 2012·Granted Oct 27, 2015·4 cites·20 claims
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