Inventor · disambiguated record
Kenneth A. Monnig
Also filed as: MONNIG KENNETH A
3 granted patents·147 citations·filing 1983–1989
75Inventor score
Top patents by PatentIndex Score
3 records- 0195US4565157AMethod and apparatus for deposition of tungsten silicidesGENUS INC·Filed 1983·Granted Jan 21, 1986·110 cites·25 claims
- 0255US4696833AMethod for applying a uniform coating to integrated circuit wafers by means of chemical depositionHEWLETT PACKARD CO·Filed 1985·Granted Sep 29, 1987·24 cites·3 claims
- 0350US4920908AMethod and apparatus for deposition of tungsten silicidesGENUS INC·Filed 1989·Granted May 1, 1990·13 cites·1 claims
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