Inventor · disambiguated record
Vladimir Machavariani
Also filed as: MACHAVARIANI VLADIMIR
15 granted patents·4 pending applications·202 citations·filing 2000–2024
91Inventor score
Top patents by PatentIndex Score
19 records- 0196US6476920B1Method and apparatus for measurements of patterned structuresNOVA MEASURING INSTR LTD·Filed 2000·Granted Nov 5, 2002·153 cites·37 claims
- 0292US12066385B2Raman spectroscopy based measurements in patterned structuresNOVA LTD·Filed 2022·Granted Aug 20, 2024·1 cites·16 claims
- 0390US2025123210A1Raman spectroscopy based measurements in patterned structuresNOVA LTD·Filed 2024·Application pending·0 cites
- 0488US7187456B2Method and apparatus for measurements of patterned structuresNOVA MEASURING INSTR LTD·Filed 2005·Granted Mar 6, 2007·11 cites·30 claims
- 0585US10564106B2Raman spectroscopy based measurements in patterned structuresNOVA MEASURING INSTR LTD·Filed 2016·Granted Feb 18, 2020·2 cites·13 claims
- 0674US11710616B2TEM-based metrology method and systemNOVA LTD·Filed 2022·Granted Jul 25, 2023·0 cites·22 claims
- 0773US11275027B2Raman spectroscopy based measurements in patterned structuresNOVA LTD·Filed 2020·Granted Mar 15, 2022·0 cites·20 claims
- 0869US11450541B2Metrology method and systemNOVA LTD·Filed 2018·Granted Sep 20, 2022·1 cites·19 claims
- 0968US10274435B2Method and system for optical metrology in patterned structuresNOVA MEASURING INSTR LTD·Filed 2015·Granted Apr 30, 2019·1 cites·15 claims
- 1067US11309162B2TEM-based metrology method and systemNOVA LTD·Filed 2021·Granted Apr 19, 2022·0 cites·5 claims
- 1166US6654108B2Test structure for metal CMP process controlNOVA MEASURING INSTR LTD·Filed 2001·Granted Nov 25, 2003·12 cites·23 claims
- 1265US6885446B2Method and system for monitoring a process of material removal from the surface of a patterned structureNOVA MEASURING INSTR LTD·Filed 2002·Granted Apr 26, 2005·6 cites·43 claims
- 1365US6836324B2Method and apparatus for measurements of patterned structuresNOVA MEASURING INSTR LTD·Filed 2001·Granted Dec 28, 2004·8 cites·36 claims
- 1464US7123366B2Method and apparatus for measurements of patterned structuresNOVA MEASURING INSTR LTD·Filed 2004·Granted Oct 17, 2006·7 cites·47 claims
- 1564US2023074398A1Metrology method and systemNOVA LTD·Filed 2022·Application pending·0 cites
- 1657US10761036B2Method and system for optical metrology in patterned structuresNOVA MEASURING INSTR LTD·Filed 2019·Granted Sep 1, 2020·0 cites·20 claims
- 1754US10916404B2TEM-based metrology method and systemNOVA MEASURING INSTR LTD·Filed 2018·Granted Feb 9, 2021·0 cites·14 claims
- 1847US2024068964A1Evaluating x-ray signals from a perturbed objectNOVA LTD·Filed 2021·Application pending·0 cites
- 1934US2001015811A1Test structure for metal CMP process controlNOVA MEASURING INSTR LTD·Filed 2001·Application pending·0 cites
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