Inventor · disambiguated record
Kazue Takahasi
Also filed as: TAKAHASI KAZUE
4 granted patents·44 citations·filing 1998–2010
74Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0173US6370007B2Electrostatic chuckHITACHI LTD·Filed 2001·Granted Apr 9, 2002·17 cites·3 claims
- 0263US6583979B1Electrostatically attracting electrode and a method of manufacture thereofHITACHI LTD·Filed 1998·Granted Jun 24, 2003·25 cites·6 claims
- 0357US7913646B2Vacuum processing apparatus and vacuum processing methodHITACHI HIGH TECH CORP·Filed 2008·Granted Mar 29, 2011·1 cites·4 claims
- 0452US8262801B2Vacuum processing methodKITAOKA KEN·Filed 2010·Granted Sep 11, 2012·1 cites·4 claims
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