Inventor · disambiguated record

Wakako Suganuma

Also filed as: SUGANUMA WAKAKO

1 granted patent·1 pending application·7 citations·filing 2001–2002

29Inventor score

Technology areasG03F

Files withNIKON CORP2

Top patents by PatentIndex Score

2 records

0160US6972417B2Apparatus and methods for patterning a reticle blank by electron-beam inscription with reduced exposure of the reticle blank by backscattered electronsNIKON CORP·Filed 2001·Granted Dec 6, 2005·7 cites·17 claims
0228US2003043358A1Methods for determining focus and astigmatism in charged-particle-beam microlithographyNIKON CORP·Filed 2002·Application pending·0 cites

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