Inventor · disambiguated record
Vincent L. Marinaro
Also filed as: MARINARO VINCENT · MARINARO VINCENT L · MARINARO VINCENT LANI
13 granted patents·246 citations·filing 1999–2002
92Inventor score
Files withADVANCED MICRO DEVICES INC13
Top patents by PatentIndex Score
13 records- 0186US6648201B1Apparatus to reduce wasting of unused photoresist in semiconductor containersADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 18, 2003·51 cites·10 claims
- 0283US6051348AMethod for detecting malfunction in photolithographic fabrication trackADVANCED MICRO DEVICES INC·Filed 1999·Granted Apr 18, 2000·54 cites·11 claims
- 0380US6245584B1Method for detecting adjustment error in photolithographic stepping printerADVANCED MICRO DEVICES INC·Filed 1999·Granted Jun 12, 2001·60 cites·13 claims
- 0479US6170494B1Method for automatically cleaning resist nozzleADVANCED MICRO DEVICES INC·Filed 2000·Granted Jan 9, 2001·28 cites·4 claims
- 0574US6318913B2Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developerADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 20, 2001·16 cites·26 claims
- 0664US6418946B1Apparatus for automatically cleaning resist nozzleADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 16, 2002·12 cites·3 claims
- 0764US6250822B1Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developerADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 26, 2001·9 cites·21 claims
- 0851US6481277B1Temperature control unit and sight glassADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 19, 2002·7 cites·12 claims
- 0949US6361599B1Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splashADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 26, 2002·2 cites·11 claims
- 1035US6238747B1Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splashADVANCED MICRO DEVICES INC·Filed 1999·Granted May 29, 2001·4 cites·3 claims
- 1132US6082379AMechanism for cleaning an integrated circuit wafer hot plate while the hot plate is at operating temperatureADVANCED MICRO DEVICES INC·Filed 1999·Granted Jul 4, 2000·3 cites·15 claims
- 1229US6299688B1Developer nozzle clean combsADVANCED MICRO DEVICES INC·Filed 1999·Granted Oct 9, 2001·0 cites·12 claims
- 1329US6176274B1Method and system for measuring fluid volume in a photolithography trackADVANCED MICRO DEVICES INC·Filed 1999·Granted Jan 23, 2001·0 cites·16 claims
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