Inventor · disambiguated record
Ted Wakamiya
Also filed as: WAKAMIYA TED
9 granted patents·151 citations·filing 2000–2002
89Inventor score
Files withADVANCED MICRO DEVICES INC9
Top patents by PatentIndex Score
9 records- 0186US6648201B1Apparatus to reduce wasting of unused photoresist in semiconductor containersADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 18, 2003·51 cites·10 claims
- 0279US6170494B1Method for automatically cleaning resist nozzleADVANCED MICRO DEVICES INC·Filed 2000·Granted Jan 9, 2001·28 cites·4 claims
- 0374US6318913B2Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developerADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 20, 2001·16 cites·26 claims
- 0473US6336960B1System and method for purging air bubbles from filtersADVANCED MICRO DEVICES INC·Filed 2000·Granted Jan 8, 2002·23 cites·9 claims
- 0564US6418946B1Apparatus for automatically cleaning resist nozzleADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 16, 2002·12 cites·3 claims
- 0664US6250822B1Semiconductor wafer manufacturing method and apparatus for an improved heat exchanger for a photoresist developerADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 26, 2001·9 cites·21 claims
- 0753US6368985B1Dual track/stepper interface configuration for wafer processingADVANCED MICRO DEVICES INC·Filed 2000·Granted Apr 9, 2002·5 cites·20 claims
- 0851US6481277B1Temperature control unit and sight glassADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 19, 2002·7 cites·12 claims
- 0936US6360959B1Dual resist dispense nozzle for wafer tracksADVANCED MICRO DEVICES INC·Filed 2000·Granted Mar 26, 2002·0 cites·20 claims
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