Inventor · disambiguated record
Tae-Hyung Lim
Also filed as: LIM TAE-HYUNG
2 granted patents·269 citations·filing 1997–1997
70Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
2 records- 0193US5885404APedestal with self retaining sealing ring for semiconductor device etching systemSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Mar 23, 1999·237 cites·8 claims
- 0263US6041733APlasma processing apparatus protected from discharges in association with secondary potentialsSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Mar 28, 2000·32 cites·21 claims
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