Inventor · disambiguated record
Paul B. Murphey
Also filed as: MURPHEY PAUL B
3 granted patents·5 citations·filing 2000–2004
58Inventor score
Technology areasH10P
Files withAGERE SYSTEMS INC3
Top patents by PatentIndex Score
3 records- 0149US6559062B1Method for avoiding notching in a semiconductor interconnect during a metal etching stepAGERE SYSTEMS INC·Filed 2000·Granted May 6, 2003·3 cites·11 claims
- 0243US6576563B2Method of manufacturing a semiconductor device employing a fluorine-based etch substantially free of hydrogenAGERE SYSTEMS INC·Filed 2001·Granted Jun 10, 2003·1 cites·20 claims
- 0338US7157375B2Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etchingAGERE SYSTEMS INC·Filed 2004·Granted Jan 2, 2007·1 cites·10 claims
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