Inventor · disambiguated record

Risa Yoshimoto

Also filed as: YOSHIMOTO RISA

1 granted patent·4 citations·filing 2009–2009

24Inventor score

Technology areasG02B

Files withMURAMATSU KOUJI1

Top patents by PatentIndex Score

1 record

0162US8908151B2Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical systemMURAMATSU KOUJI·Filed 2009·Granted Dec 9, 2014·4 cites·39 claims

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Risa Yoshimoto — Patent Inventor | PatentIndex