Inventor · disambiguated record
Shigeto Shigematsu
Also filed as: SHIGEMATSU SHIGETO
3 granted patents·1 pending application·38 citations·filing 1989–2002
70Inventor score
Top patents by PatentIndex Score
4 records- 0179US6875819B2Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the sameMITSUI CHEMICALS INC·Filed 2002·Granted Apr 5, 2005·18 cites·15 claims
- 0247US5034255AOptical recording medium and method of its productionMITSUI PETROCHEMICAL IND·Filed 1989·Granted Jul 23, 1991·14 cites·7 claims
- 0334US6620555B1Pellicle, method of preparing the same and exposure methodMITSUI CHEMICALS INC·Filed 1999·Granted Sep 16, 2003·6 cites·2 claims
- 0430US2004028269A1Photomask unit, photomask device, projection exposure device, projection exposure method and semiconductor deviceFiled 2001·Application pending·0 cites
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