Inventor · disambiguated record
Novy Tjokro
Also filed as: TJOKRO NOVY · TJOKRO NOVY SASTRAWATI
8 granted patents·1 pending application·52 citations·filing 2012–2024
79Inventor score
Files withLAM RES CORP9
Top patents by PatentIndex Score
9 records- 0197US9837312B1Atomic layer etching for enhanced bottom-up feature fillLAM RES CORP·Filed 2016·Granted Dec 5, 2017·48 cites·20 claims
- 0282US12203168B2Metal depositionLAM RES CORP·Filed 2020·Granted Jan 21, 2025·1 cites·20 claims
- 0381US2025115998A1Metal depositionLAM RES CORP·Filed 2024·Application pending·0 cites
- 0474US8603913B1Porous dielectrics K value restoration by thermal treatment and or solvent treatmentLAM RES CORP·Filed 2012·Granted Dec 10, 2013·3 cites·18 claims
- 0548US12077858B2Tungsten depositionLAM RES CORP·Filed 2020·Granted Sep 3, 2024·0 cites·21 claims
- 0646US12060639B2Rapid flush purging during atomic layer depositionLAM RES CORP·Filed 2020·Granted Aug 13, 2024·0 cites·20 claims
- 0746US9142416B1Process to reduce nodule formation in electroless platingLAM RES CORP·Filed 2014·Granted Sep 22, 2015·0 cites·15 claims
- 0846US9029258B2Through silicon via metallizationLAM RES CORP·Filed 2013·Granted May 12, 2015·0 cites·34 claims
- 0942US10103056B2Methods for wet metal seed deposition for bottom up gapfill of featuresLAM RES CORP·Filed 2017·Granted Oct 16, 2018·0 cites·27 claims
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