Inventor · disambiguated record
Harry Sewell
Also filed as: KHMELICHEK LEGAL REPRESENTATIVE MARINA · SEWELL HARRY
64 granted patents·9 pending applications·1,492 citations·filing 1975–2018
99Inventor score
Files withASML HOLDING NV43SEWELL HARRY14ASML NETHERLANDS BV6ASML HOLDING B V1DEN BOEF ARIE JEFFREY1
Top patents by PatentIndex Score
73 records- 0199US6809794B1Immersion photolithography system and method using inverted wafer-projection optics interfaceASML HOLDING NV·Filed 2003·Granted Oct 26, 2004·278 cites·42 claims
- 0299US6611316B2Method and system for dual reticle image exposureASML HOLDING NV·Filed 2002·Granted Aug 26, 2003·717 cites·14 claims
- 0396US7445883B2Lithographic printing with polarized lightASML HOLDING NV·Filed 2006·Granted Nov 4, 2008·46 cites·19 claims
- 0495US7363854B2System and method for patterning both sides of a substrate utilizing imprint lithographyASML HOLDING NV·Filed 2005·Granted Apr 29, 2008·37 cites·22 claims
- 0595US6980277B2Immersion photolithography system and method using inverted wafer-projection optics interfaceASML HOLDING NV·Filed 2004·Granted Dec 27, 2005·49 cites·35 claims
- 0693US8508736B2Tunable wavelength illumination systemDEN BOEF ARIE JEFFREY·Filed 2010·Granted Aug 13, 2013·9 cites·21 claims
- 0793US7561252B2Interferometric lithography system and method used to generate equal path lengths of interfering beamsASML HOLDING NV·Filed 2005·Granted Jul 14, 2009·18 cites·36 claims
- 0890US6628372B2Use of multiple reticles in lithographic printing toolsFiled 2001·Granted Sep 30, 2003·44 cites·5 claims
- 0989US6731374B1Beam-splitter optics design that maintains an unflipped (unmirrored) image for a catadioptric lithographic systemASML HOLDING NV·Filed 2002·Granted May 4, 2004·35 cites·23 claims
- 1087US10649349B2Lithographic apparatus, a dryer and a method of removing liquid from a surfaceASML NETHERLANDS BV·Filed 2018·Granted May 12, 2020·2 cites·20 claims
- 1187US8730476B2Tunable wavelength illumination systemASML HOLDING NV·Filed 2013·Granted May 20, 2014·4 cites·21 claims
- 1287US8623588B2Scanning EUV interference imaging for extremely high resolution patterningSEWELL HARRY·Filed 2008·Granted Jan 7, 2014·8 cites·24 claims
- 1387US7399422B2System and method for forming nanodisks used in imprint lithography and nanodisk and memory disk formed therebyASML HOLDING NV·Filed 2005·Granted Jul 15, 2008·6 cites·10 claims
- 1487US7256864B2Liquid immersion lithography system having a tilted showerhead relative to a substrateASML NETHERLANDS BV·Filed 2006·Granted Aug 14, 2007·7 cites·5 claims
- 1586US7304719B2Patterned grid element polarizerASML HOLDING NV·Filed 2004·Granted Dec 4, 2007·33 cites·23 claims
- 1686US7253879B2Liquid immersion lithography system with tilted liquid flowASML HOLDING NV·Filed 2006·Granted Aug 7, 2007·6 cites·3 claims
- 1785US10185231B2Lithographic apparatus, a dryer and a method of removing liquid from a surfaceASML NETHERLANDS BV·Filed 2017·Granted Jan 22, 2019·2 cites·20 claims
- 1884US7897058B2Device manufacturing method and computer program productASML NETHERLANDS BV·Filed 2006·Granted Mar 1, 2011·10 cites·21 claims
- 1984US7474385B2Adjustable resolution interferometric lithography systemASML HOLDING NV·Filed 2006·Granted Jan 6, 2009·6 cites·19 claims
- 2080US9041903B2Mask inspection with fourier filtering and image compareNELSON MICHAEL L·Filed 2010·Granted May 26, 2015·5 cites·20 claims
- 2180US4053806APyroelectric detector comprising nucleating material wettable by aqueous solution of pyroelectric materialPHILIPS CORP·Filed 1975·Granted Oct 11, 1977·17 cites·12 claims
- 2279US8629970B2Immersion lithographic apparatus with immersion fluid re-circulating systemSEWELL HARRY·Filed 2009·Granted Jan 14, 2014·5 cites·28 claims
- 2379US7090964B2Lithographic printing with polarized lightASML HOLDING NV·Filed 2004·Granted Aug 15, 2006·18 cites·29 claims
- 2478US8625096B2Method and system for increasing alignment target contrastSEWELL HARRY·Filed 2010·Granted Jan 7, 2014·3 cites·23 claims
- 2578US7751030B2Interferometric lithographic projection apparatusASML HOLDING NV·Filed 2006·Granted Jul 6, 2010·5 cites·25 claims
- 2676US8817226B2Systems and methods for insitu lens cleaning using ozone in immersion lithographySEWELL HARRY·Filed 2008·Granted Aug 26, 2014·4 cites·7 claims
- 2776US7882780B2System and method for patterning both sides of a substrate utilizing imprint lithographyASML HOLDING NV·Filed 2008·Granted Feb 8, 2011·3 cites·13 claims
- 2873US8654311B2Lithographic apparatus and device manufacturing methodSEWELL HARRY·Filed 2009·Granted Feb 18, 2014·3 cites·18 claims
- 2973US8054449B2Enhancing the image contrast of a high resolution exposure toolASML HOLDING NV·Filed 2006·Granted Nov 8, 2011·3 cites·20 claims
- 3073US7701668B2System and method for forming nanodisks used in imprint lithography and nanodisk and memory disk formed therebyASML HOLDING NV·Filed 2008·Granted Apr 20, 2010·5 cites·15 claims
- 3173US7684014B2Lithographic apparatus and device manufacturing methodASML HOLDING B V·Filed 2006·Granted Mar 23, 2010·5 cites·20 claims
- 3273US6800408B2Use of multiple reticles in lithographic printing toolsASML HOLDING NV·Filed 2003·Granted Oct 5, 2004·15 cites·7 claims
- 3371US9632425B2Lithographic apparatus, a dryer and a method of removing liquid from a surfaceLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2007·Granted Apr 25, 2017·2 cites·37 claims
- 3471US7409759B2Method for making a computer hard drive platen using a nano-plateASML HOLDING NV·Filed 2004·Granted Aug 12, 2008·13 cites·20 claims
- 3569US8339571B2Lithographic method and apparatusSEWELL HARRY·Filed 2008·Granted Dec 25, 2012·2 cites·38 claims
- 3668US9046754B2EUV mask inspection systemSEWELL HARRY·Filed 2009·Granted Jun 2, 2015·2 cites·14 claims
- 3765US9330912B2Lithographic apparatus, fluid combining unit and device manufacturing methodMULKENS JOHANNES CATHARINUS HUBERTUS·Filed 2011·Granted May 3, 2016·1 cites·19 claims
- 3865US7199862B2Beam-splitter optics design that maintains an unflipped (unmirrored) image for a catadioptric lithographic systemASML HOLDING NV·Filed 2005·Granted Apr 3, 2007·1 cites·14 claims
- 3965US6967713B2Use of multiple reticles in lithographic printing toolsASML HOLDING NV·Filed 2004·Granted Nov 22, 2005·7 cites·12 claims
- 4065US4933714AApparatus and method for reproducing a pattern in an annular areaPERKIN ELMER CORP·Filed 1989·Granted Jun 12, 1990·19 cites·4 claims
- 4164US8089609B2Lithographic apparatus and device manufacturing methodSEWELL HARRY·Filed 2008·Granted Jan 3, 2012·1 cites·20 claims
- 4264US7773195B2System and method to increase surface tension and contact angle in immersion lithographyASML HOLDING NV·Filed 2005·Granted Aug 10, 2010·1 cites·20 claims
- 4364US7736825B2Lithographic apparatus and device manufacturing method utilizing a resettable or reversible contrast enhancing layer in a multiple exposure systemASML HOLDING NV·Filed 2006·Granted Jun 15, 2010·1 cites·15 claims
- 4464US7548301B2Maskless optical writerASML HOLDING NV·Filed 2006·Granted Jun 16, 2009·1 cites·24 claims
- 4564US7492442B2Adjustable resolution interferometric lithography systemASML HOLDING NV·Filed 2004·Granted Feb 17, 2009·6 cites·15 claims
- 4663US8709908B2Improving alignment target contrast in a lithographic double patterning processSEWELL HARRY·Filed 2010·Granted Apr 29, 2014·1 cites·18 claims
- 4763US8045135B2Lithographic apparatus with a fluid combining unit and related device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Oct 25, 2011·1 cites·18 claims
- 4863US7995185B2Systems and methods for thermally-induced aberration correction in immersion lithographyASML HOLDING NV·Filed 2006·Granted Aug 9, 2011·1 cites·19 claims
- 4959US7410591B2Method and system for making a nano-plate for imprint lithographyASML HOLDING NV·Filed 2004·Granted Aug 12, 2008·6 cites·10 claims
- 5059US7012674B2Maskless optical writerASML HOLDING NV·Filed 2004·Granted Mar 14, 2006·6 cites·25 claims
Showing the top 50 of 73 patent records by PatentIndex Score.
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