Inventor · disambiguated record

Kanzou Katou

Also filed as: KATOU KANZOU

1 granted patent·12 citations·filing 2015–2015

34Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0189US9355442B2Film thickness measurement apparatus, film thickness measurement method, and non-transitory computer storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted May 31, 2016·12 cites·11 claims

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