Inventor · disambiguated record
Madan M. Nanda
Also filed as: NANDA MADAN M
3 granted patents·156 citations·filing 1984–1988
76Inventor score
Technology areasH10P
Files withIBM3
Top patents by PatentIndex Score
3 records- 0186US4978419AProcess for defining vias through silicon nitride and polyamideIBM·Filed 1988·Granted Dec 18, 1990·99 cites·4 claims
- 0265US4567132AMulti-level resist image reversal lithography processIBM·Filed 1984·Granted Jan 28, 1986·33 cites·2 claims
- 0360US4640738ASemiconductor contact protectionIBM·Filed 1984·Granted Feb 3, 1987·24 cites·7 claims
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