Inventor · disambiguated record
Reiko Sasahara
Also filed as: SASAHARA REIKO
7 granted patents·2 pending applications·6 citations·filing 2008–2025
74Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0180US12381090B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Aug 5, 2025·1 cites·20 claims
- 0271US2025336682A1Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0370US8026150B2Semiconductor device manufacturing method and storage mediumTOKYO ELECTRON LTD·Filed 2009·Granted Sep 27, 2011·3 cites·11 claims
- 0461US8282984B2Processing condition inspection and optimization method of damage recovery process, damage recovering system and storage mediumSASAHARA REIKO·Filed 2008·Granted Oct 9, 2012·2 cites·22 claims
- 0548US12512302B2Gas treatment apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Dec 30, 2025·0 cites·7 claims
- 0644US11548804B2Method and apparatus for processing oxygen-containing workpieceTOKYO ELECTRON LTD·Filed 2019·Granted Jan 10, 2023·0 cites·6 claims
- 0743US2013025537A1Processing condition inspection and optimization method of damage recovery process, damage recovering system and storage mediumSASAHARA REIKO·Filed 2012·Application pending·0 cites
- 0839US11127597B2Etching methodTOKYO ELECTRON LTD·Filed 2018·Granted Sep 21, 2021·0 cites·15 claims
- 0938US10964546B2Substrate processing method and method for removing boron-doped siliconTOKYO ELECTRON LTD·Filed 2017·Granted Mar 30, 2021·0 cites·10 claims
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