Inventor · disambiguated record
Tatsuya Handa
Also filed as: HANDA TATSUYA
6 granted patents·2 pending applications·17 citations·filing 2001–2022
76Inventor score
Top patents by PatentIndex Score
8 records- 0184US8896210B2Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2012·Granted Nov 25, 2014·10 cites·21 claims
- 0266US8282770B2Substrate processing apparatus and electrode structureHANDA TATSUYA·Filed 2008·Granted Oct 9, 2012·3 cites·13 claims
- 0362US8758551B2Substrate processing apparatus and electrode structureTOKYO ELECTRON LTD·Filed 2013·Granted Jun 24, 2014·1 cites·7 claims
- 0462US7718005B2Film forming equipment and film forming methodTOKYO ELECTRON LTD·Filed 2005·Granted May 18, 2010·2 cites·19 claims
- 0559US8480849B2Substrate processing apparatus and electrode structureHANDA TATSUYA·Filed 2012·Granted Jul 9, 2013·1 cites·8 claims
- 0648US12512302B2Gas treatment apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Dec 30, 2025·0 cites·7 claims
- 0746US2010041240A1Focus ring, plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0835US2004020599A1Treating deviceFiled 2001·Application pending·0 cites
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