Inventor · disambiguated record
Nadja Schuh
Also filed as: SCHUH NADJA
6 granted patents·8 citations·filing 2007–2023
76Inventor score
Top patents by PatentIndex Score
6 records- 0188US10908496B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2017·Granted Feb 2, 2021·3 cites·20 claims
- 0278US12474629B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2023·Granted Nov 18, 2025·0 cites·20 claims
- 0375US7916269B2Lithographic apparatus and contamination removal or prevention methodASML NETHERLANDS BV·Filed 2007·Granted Mar 29, 2011·3 cites·12 claims
- 0472US9599908B2Lithographic apparatus and contamination removal or prevention methodASML NETHERLANDS BV·Filed 2015·Granted Mar 21, 2017·1 cites·20 claims
- 0571US11762281B2Membrane for EUV lithographyASML NETHERLANDS BV·Filed 2020·Granted Sep 19, 2023·0 cites·20 claims
- 0667US9158206B2Lithographic apparatus and contamination removal or prevention methodDE JONG ANTHONIUS MARTINUS CORNELIS PETRUS·Filed 2011·Granted Oct 13, 2015·1 cites·13 claims
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