Inventor · disambiguated record

Edward P. Higgins

Also filed as: HIGGINS EDWARD P

2 granted patents·25 citations·filing 2007–2010

60Inventor score

Technology areasG06Q H10P

Files withBARKER BRIAN C1 IBM1

Top patents by PatentIndex Score

2 records

0183US7864502B2In situ monitoring of wafer charge distribution in plasma processingIBM·Filed 2007·Granted Jan 4, 2011·17 cites·27 claims
0278US8634949B2Manufacturing management using tool operating dataBARKER BRIAN C·Filed 2010·Granted Jan 21, 2014·8 cites·20 claims

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Edward P. Higgins — Patent Inventor | PatentIndex