Inventor · disambiguated record

James A Gallo

Also filed as: GALLO JAMES A

1 granted patent·17 citations·filing 2007–2007

38Inventor score

Technology areasH10P

Files withIBM1

Top patents by PatentIndex Score

1 record

0183US7864502B2In situ monitoring of wafer charge distribution in plasma processingIBM·Filed 2007·Granted Jan 4, 2011·17 cites·27 claims

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