Inventor · disambiguated record
Michael C. Smits
Also filed as: SMITS MICHAEL C
3 granted patents·14 citations·filing 2005–2007
61Inventor score
Technology areasH10P
Files withIBM3
Top patents by PatentIndex Score
3 records- 0188US7462527B2Method of forming nitride films with high compressive stress for improved PFET device performanceIBM·Filed 2005·Granted Dec 9, 2008·14 cites·16 claims
- 0253US7804136B2Method of forming nitride films with high compressive stress for improved PFET device performanceIBM·Filed 2007·Granted Sep 28, 2010·0 cites·5 claims
- 0353US7491660B2Method of forming nitride films with high compressive stress for improved PFET device performanceIBM·Filed 2007·Granted Feb 17, 2009·0 cites·12 claims
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