Inventor · disambiguated record
Fu-Sheng Lee
Also filed as: LEE FU-SHENG
4 granted patents·47 citations·filing 1999–2001
76Inventor score
Files withTAIWAN SEMICONDUCTOR MFG4
Top patents by PatentIndex Score
4 records- 0163US6179691B1Method for endpoint detection for copper CMPTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jan 30, 2001·21 cites·14 claims
- 0257US6528836B2Photomask ESD protection and an anti-ESD pod with such protectionTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Mar 4, 2003·7 cites·10 claims
- 0345US6503124B1Method for endpoint detection for copper CMPTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Jan 7, 2003·2 cites·3 claims
- 0445US6225226B1Method for processing and integrating copper interconnectsTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted May 1, 2001·17 cites·15 claims
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