Inventor · disambiguated record
Yoon-Bon Koo
Also filed as: KOO YOON-BON
2 granted patents·1 pending application·2 citations·filing 2002–2006
40Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
3 records- 0144US7538046B2Method of cleaning semiconductor device fabrication apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted May 26, 2009·0 cites·11 claims
- 0242US7141512B2Method of cleaning semiconductor device fabrication apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Nov 28, 2006·2 cites·5 claims
- 0329US2003042133A1Method for depositing a metal barrier layerFiled 2002·Application pending·0 cites
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