Inventor · disambiguated record
Gen Marumoto
Also filed as: MARUMOTO GEN
3 granted patents·209 citations·filing 1984–1991
77Inventor score
Files withHITACHI LTD3
Top patents by PatentIndex Score
3 records- 0192US4563240AMethod and apparatus for plasma processHITACHI LTD·Filed 1984·Granted Jan 7, 1986·117 cites·12 claims
- 0283US4615761AMethod of and apparatus for detecting an end point of plasma treatmentHITACHI LTD·Filed 1985·Granted Oct 7, 1986·57 cites·12 claims
- 0373US5118378AApparatus for detecting an end point of etchingHITACHI LTD·Filed 1991·Granted Jun 2, 1992·35 cites·4 claims
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