Inventor · disambiguated record

Murali D. Rangachari

Also filed as: RANGACHARI MURALI D

2 granted patents·149 citations·filing 1998–2002

70Inventor score

Technology areasG05B Y02P

Files withASYST TECHNOLOGIES1

Top patents by PatentIndex Score

2 records

0189US6470227B1Method and apparatus for automating a microelectric manufacturing processFiled 1998·Granted Oct 22, 2002·121 cites·30 claims
0287US6810294B2Method and apparatus for automating a microelectronic manufacturing processASYST TECHNOLOGIES·Filed 2002·Granted Oct 26, 2004·28 cites·15 claims

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