Inventor · disambiguated record
Matthias Fuertsch
Also filed as: FUERTSCH MATTHIAS · FUERTSCH MATTHIAS WERNER
8 granted patents·6 pending applications·116 citations·filing 1997–2007
87Inventor score
Top patents by PatentIndex Score
14 records- 0179US7148077B2Micromechanical structural element having a diaphragm and method for producing such a structural elementBOSCH GMBH ROBERT·Filed 2004·Granted Dec 12, 2006·27 cites·14 claims
- 0272US6523403B1Mass flow sensorBOSCH GMBH ROBERT·Filed 2000·Granted Feb 25, 2003·18 cites·12 claims
- 0370US7025163B2Device for detecting a deformation of a componentBOSCH GMBH ROBERT·Filed 2002·Granted Apr 11, 2006·20 cites·28 claims
- 0469US5851922AProcess for fabricating a device using nitrogen implantation into silicide layerLUCENT TECHNOLOGIES INC·Filed 1997·Granted Dec 22, 1998·32 cites·12 claims
- 0560US7740459B2Micropump having a pump diaphragm and a polysilicon layerBOSCH GMBH ROBERT·Filed 2004·Granted Jun 22, 2010·6 cites·3 claims
- 0658US7060197B2Micromechanical mass flow sensor and method for the production thereofBOSCH GMBH ROBERT·Filed 2002·Granted Jun 13, 2006·10 cites·7 claims
- 0749US6251699B1Method for fabricating micromechanical componentsBOSCH GMBH ROBERT·Filed 2000·Granted Jun 26, 2001·3 cites·7 claims
- 0848US2008041151A1Microfluidic device, in particular for metering a fluid or for the metered dispensing of a fluid, and method for producing a microfluidic deviceFUERTSCH MATTHIAS·Filed 2007·Application pending·0 cites
- 0946US7279759B2Membrane sensorBOSCH GMBH ROBERT·Filed 2004·Granted Oct 9, 2007·0 cites·13 claims
- 1041US2007128755A1Micronozzle plate and manufacturing methodFUERTSCH MATTHIAS·Filed 2006·Application pending·0 cites
- 1138US2005006235A1Sensor elementFiled 2004·Application pending·0 cites
- 1237US2009148634A1Insert and Injection-Molded Part Having an InsertBOSCH GMBH ROBERT·Filed 2006·Application pending·0 cites
- 1337US2004261521A1Flow sensor having two heating resistorsHECHT HANS·Filed 2004·Application pending·0 cites
- 1436US2005022593A1Fluid flow sensorFiled 2004·Application pending·0 cites
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