Inventor · disambiguated record
Manfred Schuhmacher
Also filed as: SCHUHMACHER MANFRED
10 granted patents·2 pending applications·207 citations·filing 1989–2006
90Inventor score
Files withLEYBOLD AG7APPLIED FILMS GMBH & CO KG1BEYBOLD SYSTEMS GMBH1LEYBOLD SYSTEM GMBH1LEYBOLD SYSTEMS GMBH1
Top patents by PatentIndex Score
12 records- 0176US5421978ATarget cooling system with troughLEYBOLD AG·Filed 1993·Granted Jun 6, 1995·36 cites·14 claims
- 0271US5944967ADual target cathode assembly with shieldingLEYBOLD AG·Filed 1995·Granted Aug 31, 1999·38 cites·3 claims
- 0370US6302372B1Gate valveBEYBOLD SYSTEMS GMBH·Filed 1999·Granted Oct 16, 2001·42 cites·10 claims
- 0463US5662784AApparatus for applying thin layers to a substrateLEYBOLD AG·Filed 1996·Granted Sep 2, 1997·19 cites·10 claims
- 0562US4943363ACathode sputtering systemLEYBOLD AG·Filed 1989·Granted Jul 24, 1990·27 cites·18 claims
- 0651US5232572ADevice for the releasable fastening of a target or target base on a cathode mountingLEYBOLD AG·Filed 1992·Granted Aug 3, 1993·11 cites·7 claims
- 0749US5898127AApparatus for shielding against high-frequency electromagnetic radiationLEYBOLD SYSTEM GMBH·Filed 1997·Granted Apr 27, 1999·20 cites·12 claims
- 0842US2007029192A1Tube cathode for use in sputter processesSCHUHMACHER MANFRED·Filed 2006·Application pending·0 cites
- 0940US4984531ADevice for accepting and holding a workpiece in vacuum coating apparatusLEYBOLD AG·Filed 1989·Granted Jan 15, 1991·10 cites·20 claims
- 1038US5616226ACathode assemblyLEYBOLD AG·Filed 1995·Granted Apr 1, 1997·4 cites·6 claims
- 1138US2006196414A1System for coating a substrate, and an insert elementAPPLIED FILMS GMBH & CO KG·Filed 2006·Application pending·0 cites
- 1223US6187158B1Device for coating plate-shaped substratesLEYBOLD SYSTEMS GMBH·Filed 1999·Granted Feb 13, 2001·0 cites·11 claims
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