Inventor · disambiguated record

Ernst Habekotte

Also filed as: HABEKOTTE ERNST

2 granted patents·89 citations·filing 2004–2011

60Inventor score

Technology areasG03F H01J

Files withMAPPER LITHOGRAPHY IP BV1 WIELAND MARCO JAN-JACO1

Top patents by PatentIndex Score

2 records

0191US7019908B2Modulator circuitryMAPPER LITHOGRAPHY IP BV·Filed 2004·Granted Mar 28, 2006·88 cites·27 claims
0260US9305747B2Data path for lithography apparatusWIELAND MARCO JAN-JACO·Filed 2011·Granted Apr 5, 2016·1 cites·18 claims

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