Inventor · disambiguated record
Ernie Allen
Also filed as: ALLEN ERNIE · ALLEN ERNIE L
4 granted patents·90 citations·filing 1989–2003
79Inventor score
Top patents by PatentIndex Score
4 records- 0184US6946403B2Method of making a MEMS electrostatic chuckAXCELIS TECH INC·Filed 2003·Granted Sep 20, 2005·32 cites·49 claims
- 0273US5009806ACalcium hypochlorite articlePPG INDUSTRIES INC·Filed 1990·Granted Apr 23, 1991·27 cites·12 claims
- 0372US4970020ACalcium hypochlorite compositionPPG INDUSTRIES INC·Filed 1989·Granted Nov 13, 1990·20 cites·10 claims
- 0467US6905984B2MEMS based contact conductivity electrostatic chuckAXCELIS TECH INC·Filed 2003·Granted Jun 14, 2005·11 cites·26 claims
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