Inventor · disambiguated record
Masahiro Seyama
Also filed as: SEYAMA MASAHIRO
7 granted patents·16 citations·filing 1998–2017
75Inventor score
Top patents by PatentIndex Score
7 records- 0178US9734988B2Exposure apparatus and exposure methodINTEL CORP·Filed 2015·Granted Aug 15, 2017·2 cites·12 claims
- 0257US10256074B2Exposure apparatus and exposure methodINTEL CORP·Filed 2017·Granted Apr 9, 2019·0 cites·17 claims
- 0347US9859099B2Exposure apparatus and exposure methodADVANTEST CORP·Filed 2016·Granted Jan 2, 2018·0 cites·10 claims
- 0444US9977337B2Exposure apparatus and exposure methodADVANTEST CORP·Filed 2016·Granted May 22, 2018·0 cites·9 claims
- 0544US6163159ACharged particle beam test systemADVANTEST CORP·Filed 1998·Granted Dec 19, 2000·14 cites·7 claims
- 0641US7262410B2Sample observing apparatus and sample observing methodADVANTEST CORP·Filed 2005·Granted Aug 28, 2007·0 cites·9 claims
- 0735US9607807B2Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the sameADVANTEST CORP·Filed 2015·Granted Mar 28, 2017·0 cites·13 claims
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