Inventor · disambiguated record
Takuro Tsujikawa
Also filed as: TSUJIKAWA TAKURO
5 granted patents·1 pending application·9 citations·filing 2010–2018
70Inventor score
Top patents by PatentIndex Score
6 records- 0183US10120294B2Lithography apparatus and article manufacturing methodCANON KK·Filed 2015·Granted Nov 6, 2018·4 cites·12 claims
- 0268US10460433B2Measurement method, measurement apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2017·Granted Oct 29, 2019·1 cites·11 claims
- 0368US10095124B2Detection apparatus, lithography apparatus, method of manufacturing article, and detection methodCANON KK·Filed 2016·Granted Oct 9, 2018·2 cites·12 claims
- 0459US8339570B2Mark position detection device and mark position detection method, exposure apparatus using same, and device manufacturing methodTSUJIKAWA TAKURO·Filed 2010·Granted Dec 25, 2012·2 cites·12 claims
- 0536US2018329294A1Lithography apparatus and method of manufacturing articleCANON KK·Filed 2018·Application pending·0 cites
- 0635US9575413B2Exposure apparatus, exposure method, and device manufacturing methodCANON KK·Filed 2015·Granted Feb 21, 2017·0 cites·13 claims
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