Inventor · disambiguated record
John Shamaly
Also filed as: SHAMALY JOHN
2 granted patents·6 citations·filing 2002–2004
53Inventor score
Technology areasH10P
Files withASML HOLDING NV2
Top patents by PatentIndex Score
2 records- 0153US6757110B2Catadioptric lithography system and method with reticle stage orthogonal to wafer stageASML HOLDING NV·Filed 2002·Granted Jun 29, 2004·4 cites·14 claims
- 0247US6977716B2Catadioptric lithography system and method with reticle stage orthogonal to wafer stageASML HOLDING NV·Filed 2004·Granted Dec 20, 2005·2 cites·17 claims
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