Inventor · disambiguated record
Bi-Troug Chen
Also filed as: CHEN BI-TROUG
2 granted patents·23 citations·filing 2002–2004
59Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
2 records- 0176US7193325B2Reliability improvement of SiOC etch with trimethylsilane gas passivation in Cu damascene interconnectsTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Mar 20, 2007·19 cites·13 claims
- 0249US6759342B2Method of avoiding dielectric arcingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jul 6, 2004·4 cites·18 claims
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