Inventor · disambiguated record

Hideyuki Yamamato

Also filed as: YAMAMATO HIDEYUKI

1 granted patent·58 citations·filing 2001–2001

53Inventor score

Technology areasH10P

Files withHITACHI LTD1

Top patents by PatentIndex Score

1 record

0192US6616759B2Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system thereforHITACHI LTD·Filed 2001·Granted Sep 9, 2003·58 cites·9 claims

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