Inventor · disambiguated record
Martin Dietzel
Also filed as: DIETZEL MARTIN
4 granted patents·0 citations·filing 2019–2021
52Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH4
Top patents by PatentIndex Score
4 records- 0157US12288272B2Method for determining a production aerial image of an object to be measuredZEISS CARL SMT GMBH·Filed 2021·Granted Apr 29, 2025·0 cites·20 claims
- 0250US10564551B2Method for determining a focus position of a lithography mask and metrology system for carrying out such a methodZEISS CARL SMT GMBH·Filed 2019·Granted Feb 18, 2020·0 cites·19 claims
- 0346US10481505B2Method for determining an imaging aberration contribution of an imaging optical unit for measuring lithography masksZEISS CARL SMT GMBH·Filed 2019·Granted Nov 19, 2019·0 cites·20 claims
- 0445US11061331B2Method for determining a structure-independent contribution of a lithography mask to a fluctuation of the linewidthZEISS CARL SMT GMBH·Filed 2019·Granted Jul 13, 2021·0 cites·10 claims
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